Advances in SiC growth using chloride-based CVD
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منابع مشابه
SiC epitaxy growth using chloride-based CVD
The growth of thick epitaxial SiC layers needed for high-voltage, high-power devices is investigated with the chloride-based chemical vapor deposition. High growth rates exceeding 100 μm/h can be obtained, however to obtain device quality epilayers adjustments of the process parameters should be carried out appropriately for the chemistry used. Two different chemistry approaches are compared: a...
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The chlorinated precursor methyltrichlorosilane (MTS), CH3SiCl3, has been used to grow epitaxial layers of 4H-SiC in a hot wall chemical vapour deposition (CVD) reactor with growth rates higher than 100 mm/h. The addition of chlorinated species to the gas mixture prevents silicon nucleation in the gas phase, thus allowing higher input flows of the precursors resulting in much higher growth rate...
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For the emerging semiconductor material silicon carbide (SiC) used in high power devices, chemical vapor deposition (CVD) is the most prominent method to create the electrically active SiC epitaxial layers in the device. The process of growing such epitaxial layers is to use a hydrocarbon and silane diluted in hydrogen flow through a hot chamber where chemical reactions take place in such a man...
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The growth of b-SiC films via chemical vapor deposition (CVD) has been under intensive investigation because this is viewed to be an enabling material for a variety of new semiconductor devices in areas where silicon cannot effectively compete. However, the difficulty in achieving single-crystal or highly textured surface morphology in films with low bulk defect density has limited the use of b...
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تاریخ انتشار 2010